Inventor · disambiguated record

Yurii Victorvitch Sidelnikov

Also filed as: SIDELNIKOV YURII VICTORVITCH

1 granted patent·0 citations·filing 2003–2003

10Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0137US7800079B2Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Sep 21, 2010·0 cites·25 claims

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