Inventor · disambiguated record
Karl-Eugen Aubele
Also filed as: AUBELE KARL-EUGEN
17 granted patents·1 pending application·489 citations·filing 1986–2013
94Inventor score
Top patents by PatentIndex Score
18 records- 0195US4769763AControl for coordinate measuring instrumentsZEISS STIFTUNG·Filed 1986·Granted Sep 6, 1988·212 cites·9 claims
- 0293US5526576ACoordinate measurement machine having a probe head and an electronic system for processing probe signalsZEISS STIFTUNG·Filed 1994·Granted Jun 18, 1996·176 cites·32 claims
- 0387US7710542B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2007·Granted May 4, 2010·7 cites·23 claims
- 0486US7961294B2Imaging device in a projection exposure facilityZEISS CARL SMT GMBH·Filed 2008·Granted Jun 14, 2011·6 cites·21 claims
- 0584US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 0680US7929227B2Optical assemblyZEISS CARL SMT GMBH·Filed 2010·Granted Apr 19, 2011·4 cites·29 claims
- 0778US7304717B2Imaging device in a projection exposure facilityZEISS CARL SMT AG·Filed 2002·Granted Dec 4, 2007·12 cites·21 claims
- 0876US7791826B2Optical assemblyZEISS CARL SMT AG·Filed 2006·Granted Sep 7, 2010·6 cites·63 claims
- 0970US8879046B2Method for moving an optical element of a projection exposure apparatus for microlithographyZEISS CARL SMT GMBH·Filed 2013·Granted Nov 4, 2014·3 cites·20 claims
- 1066US5018280AMethod and device for the operation of a workpiece-contacting probe head of the switching typeZEISS STIFTUNG·Filed 1990·Granted May 28, 1991·25 cites·15 claims
- 1158US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 1256US8810934B2Positioning method for an optical arrangement of a projection illumination systemAUBELE KARL-EUGEN·Filed 2011·Granted Aug 19, 2014·1 cites·20 claims
- 1353US4758720AMethod and means for measuring guidance errors at one or more points along the length of a displacement-measuring systemZEISS STIFTUNG·Filed 1986·Granted Jul 19, 1988·15 cites·9 claims
- 1451US6759670B2Method for dynamic manipulation of a position of a module in an optical systemFiled 2001·Granted Jul 6, 2004·3 cites·36 claims
- 1550US8570676B2Optical assemblyBIEG HERMANN·Filed 2011·Granted Oct 29, 2013·0 cites·29 claims
- 1650US8514371B2Imaging device in a projection exposure facilityHUMMEL WOLFGANG·Filed 2011·Granted Aug 20, 2013·0 cites·20 claims
- 1750US7684131B2Method and a device for positioning an element in an optical systemZEISS CARL SMT AG·Filed 2007·Granted Mar 23, 2010·0 cites·13 claims
- 1850US4785545AMeans for simultaneously connecting a plurality of switch-type probe heads to the measurement arm of a coordinate-measuring machineZEISS STIFTUNG·Filed 1987·Granted Nov 22, 1988·11 cites·10 claims
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