Inventor · disambiguated record
Uwe Goetz
Also filed as: GOETZ UWE
1 granted patent·1 pending application·2 citations·filing 2008–2008
19Inventor score
Technology areasG01B
Files withVISTEC SEMICONDUCTOR SYS GMBH2
Top patents by PatentIndex Score
2 records- 0143US7817262B2Device for measuring positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Oct 19, 2010·2 cites·12 claims
- 0224US2009002715A1Coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
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