Inventor · disambiguated record

Durk Oeds Van Der Ploeg

Also filed as: VAN DER PLOEG DURK OEDS

1 granted patent·11 citations·filing 2007–2007

33Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0182US7916927B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Mar 29, 2011·11 cites·20 claims

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