Inventor · disambiguated record

Wen-Yen Yen

Also filed as: YEN WEN-YEN

1 granted patent·0 citations·filing 2014–2014

10Inventor score

Technology areasG03F

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0140US9746777B2Exposure apparatus and exposure method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 29, 2017·0 cites·20 claims

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