Inventor · disambiguated record

Masahito Hiratuka

Also filed as: HIRATUKA MASAHITO

1 granted patent·11 citations·filing 1992–1992

34Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0136US5368684AEtching method for a silicon-containing layer using hydrogen bromideTOKYO ELECTRON LTD·Filed 1992·Granted Nov 29, 1994·11 cites·2 claims

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