Inventor · disambiguated record

Rudolf K. Faulhaber

Also filed as: FAULHABER RUDOLF K

1 granted patent·109 citations·filing 1991–1991

53Inventor score

Technology areasH01J

Files withLEYBOLD AG1

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1 record

0192US5113790AApparatus for the plasma treatment of substratesLEYBOLD AG·Filed 1991·Granted May 19, 1992·109 cites·12 claims

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