Inventor · disambiguated record
Harunobu Muto
Also filed as: MUTO HARUNOBU
1 granted patent·1 pending application·11 citations·filing 2001–2003
33Inventor score
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2 records- 0172US6946662B2Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing methodHITACHI LTD·Filed 2003·Granted Sep 20, 2005·11 cites·19 claims
- 0229US2002027204A1Electron beam exposure apparatus, device for shaping a beam of charged particles and method for manufacturing the deviceADVANTEST CORP·Filed 2001·Application pending·0 cites
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