Inventor · disambiguated record
John W. Vanderpot
Also filed as: VANDERPOT JOHN W · VANDERPOT JOHN WILLIAM
21 granted patents·1 pending application·1,416 citations·filing 1987–2006
97Inventor score
Top patents by PatentIndex Score
22 records- 0198US5984391AMicrofeature wafer handling apparatus and methodsNOVELLUS SYSTEMS INC·Filed 1997·Granted Nov 16, 1999·506 cites·17 claims
- 0298US4980562AMethod and apparatus for high efficiency scanning in an ion implanterVARIAN ASSOCIATES·Filed 1989·Granted Dec 25, 1990·123 cites·18 claims
- 0398US4922106AIon beam scanning method and apparatusVARIAN ASSOCIATES·Filed 1987·Granted May 1, 1990·162 cites·10 claims
- 0496US7135691B2Reciprocating drive for scanning a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 14, 2006·36 cites·63 claims
- 0594US5565036AApparatus and method for igniting plasma in a process moduleTEL AMERICA INC·Filed 1994·Granted Oct 15, 1996·115 cites·34 claims
- 0692US7547899B2Charged beam dump and particle attractorAXCELIS TECH INC·Filed 2006·Granted Jun 16, 2009·12 cites·28 claims
- 0791US5595784ATitanium nitride and multilayers formed by chemical vapor deposition of titanium halidesFiled 1995·Granted Jan 21, 1997·133 cites·14 claims
- 0891US5313848ADisposable electronic monitor deviceSENSITECH INC·Filed 1991·Granted May 24, 1994·72 cites·12 claims
- 0989US7323695B2Reciprocating drive for scanning a workpieceAXCELIS TECH INC·Filed 2005·Granted Jan 29, 2008·11 cites·25 claims
- 1089US7141809B2Method for reciprocating a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 28, 2006·12 cites·20 claims
- 1186US5789867AApparatus and method for igniting plasma in a process moduleTEL AMERICA INC·Filed 1996·Granted Aug 4, 1998·54 cites·12 claims
- 1285US6428262B1Compact load lock system for ion beam processing of foupsPROTEROS LLC·Filed 2000·Granted Aug 6, 2002·37 cites·27 claims
- 1383US6777687B2Substrate positioning systemAXCELIS TECH INC·Filed 2002·Granted Aug 17, 2004·23 cites·27 claims
- 1482US7381977B2Ion beam profilerAXCELIS TECH INC·Filed 2005·Granted Jun 3, 2008·6 cites·25 claims
- 1578USRE36200EDisposable electronic monitor deviceBERRIAN DONALD W·Filed 1996·Granted Apr 27, 1999·42 cites·13 claims
- 1675US7547898B2Particulate prevention in ion implantationAXCELIS TECH INC·Filed 2006·Granted Jun 16, 2009·2 cites·22 claims
- 1772US6765219B2Hybrid scanning system and methods for ion implantationVARIAH SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jul 20, 2004·12 cites·7 claims
- 1871US6172372B1Scanning system with linear gas bearings and active counter-balance optionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Jan 9, 2001·22 cites·15 claims
- 1966US6082297AEncapsulated thermofoil heater apparatus and associated methodsNOVELLUS SYTEMS INC·Filed 1997·Granted Jul 4, 2000·35 cites·38 claims
- 2057US7579604B2Beam stop and beam tuning methodsAXCELIS TECH INC·Filed 2006·Granted Aug 25, 2009·0 cites·32 claims
- 2149US6921907B2Substrate positioning systemAXCELIS TECH INC·Filed 2004·Granted Jul 26, 2005·1 cites·16 claims
- 2241US2002125446A1Substrate positioning systemFiled 2002·Application pending·0 cites
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