Inventor · disambiguated record
Michael Toeller
Also filed as: TOELLER MICHAEL
2 granted patents·2 pending applications·6 citations·filing 2003–2006
49Inventor score
Top patents by PatentIndex Score
4 records- 0154US7235440B2Formation of ultra-thin oxide layers by self-limiting interfacial oxidationIBM·Filed 2003·Granted Jun 26, 2007·5 cites·12 claims
- 0245US7202186B2Method of forming uniform ultra-thin oxynitride layersIBM·Filed 2003·Granted Apr 10, 2007·1 cites·30 claims
- 0340US2005056219A1Formation of a metal-containing film by sequential gas exposure in a batch type processing systemTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 0438US2007037412A1In-situ atomic layer depositionTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
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