Inventor · disambiguated record
Erin Madden
Also filed as: MADDEN ERIN · MADDEN ERIN M
2 granted patents·1 pending application·7 citations·filing 2007–2015
52Inventor score
Top patents by PatentIndex Score
3 records- 0176US9653266B2Microwave plasma applicator with improved power uniformityMKS INSTR INC·Filed 2015·Granted May 16, 2017·3 cites·51 claims
- 0260US8500382B2Airflow management for particle abatement in semiconductor manufacturing equipmentCASTANTINI JAMES S·Filed 2007·Granted Aug 6, 2013·4 cites·25 claims
- 0341US2015279626A1Microwave plasma applicator with improved power uniformityMKS INSTR INC·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →