Inventor · disambiguated record

Silvia Aguilar

Also filed as: AGUILAR SILVIA · AGUILAR SILVIA R

2 granted patents·7 citations·filing 2015–2017

45Inventor score

Technology areasH10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0187US9698036B2Stacked wafer cassette loading systemLAM RES CORP·Filed 2015·Granted Jul 4, 2017·7 cites·20 claims
0228US10903065B2Halogen removal module and associated systems and methodsLAM RES CORP·Filed 2017·Granted Jan 26, 2021·0 cites·26 claims

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