Inventor · disambiguated record

Yinlei Wei

Also filed as: WEI YINLEI

1 granted patent·0 citations·filing 2018–2018

8Inventor score

Technology areasG03F

Files withSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1

Top patents by PatentIndex Score

1 record

0138US10345720B2Photolithography tool and method for compensating for surface deformation in carrier of photolithography toolSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jul 9, 2019·0 cites·10 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →