Inventor · disambiguated record

Chang-Tai Chiao

Also filed as: CHIAO CHANG-TAI

2 granted patents·68 citations·filing 1992–2002

66Inventor score

Technology areasH10D H10P

Files withLAM RES CORP1 TAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

2 records

0177US6559049B2All dual damascene oxide etch process steps in one confined plasma chamberLAM RES CORP·Filed 2002·Granted May 6, 2003·24 cites·18 claims
0275US5286667AModified and robust self-aligning contact processTAIWAN SEMICONDUCTOR MFG·Filed 1992·Granted Feb 15, 1994·44 cites·13 claims

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