Inventor · disambiguated record
Yukio Oppata
Also filed as: OPPATA YUKIO
1 granted patent·4 pending applications·0 citations·filing 2009–2024
9Inventor score
Top patents by PatentIndex Score
5 records- 0159US2024427229A1Manufacturing method for photomask, and photomaskKIOXIA CORP·Filed 2024·Application pending·0 cites
- 0250US11275305B2Method for producing photomask, method for producing semiconductor device, method for forming pattern, and photomaskKIOXIA CORP·Filed 2020·Granted Mar 15, 2022·0 cites·14 claims
- 0348US2015258226A1Substrate storing case, substrate cleaning apparatus and substrate storing case cleaning apparatusTOSHIBA KK·Filed 2014·Application pending·0 cites
- 0445US2021341830A1Pattern forming method, photomask substrate creation method, photomask creation method, and photomaskKIOXIA CORP·Filed 2021·Application pending·0 cites
- 0540US2009305153A1Substrate processing method and mask manufacturing methodSAKURAI HIDEAKI·Filed 2009·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →