Inventor · disambiguated record

Hsi-Shui Liu

Also filed as: LIU HSI-SHUI

1 granted patent·0 citations·filing 2009–2009

7Inventor score

Technology areasH10P

Files withLIU HSI-SHUI1

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1 record

0136US9543181B2Replaceable electrostatic chuck sidewall shieldLIU HSI-SHUI·Filed 2009·Granted Jan 10, 2017·0 cites·21 claims

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