Inventor · disambiguated record
Peter Krotov
Also filed as: KROTOV PETER
7 granted patents·4 pending applications·467 citations·filing 2002–2021
83Inventor score
Top patents by PatentIndex Score
11 records- 0197US7993457B1Deposition sub-chamber with variable flowNOVELLUS SYSTEMS INC·Filed 2007·Granted Aug 9, 2011·442 cites·24 claims
- 0296US11335662B2Solder reflow oven for batch processingYIELD ENG SYSTEMS INC·Filed 2021·Granted May 17, 2022·5 cites·13 claims
- 0392US11444053B2Batch processing oven and methodYIELD ENG SYSTEMS INC·Filed 2020·Granted Sep 13, 2022·3 cites·14 claims
- 0470US6758591B1Mixing of materials in an integrated circuit manufacturing equipmentNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 6, 2004·16 cites·19 claims
- 0567US10090174B2Apparatus for purging semiconductor process chamber slit valve openingLAM RES CORP·Filed 2016·Granted Oct 2, 2018·1 cites·23 claims
- 0654US10872787B2Apparatus for purging semiconductor process chamber slit valve openingLAM RES CORP·Filed 2018·Granted Dec 22, 2020·0 cites·9 claims
- 0752US2013078375A1Deposition source integration into coaterKROTOV PETER·Filed 2012·Application pending·0 cites
- 0847US2009277472A1Photoresist Stripping Method and ApparatusNOVELLUS SYSTEMS INC·Filed 2009·Application pending·0 cites
- 0943US2013312663A1Vapor Delivery ApparatusKHOSLA MUKUL·Filed 2012·Application pending·0 cites
- 1042US2008081114A1Apparatus and method for delivering uniform fluid flow in a chemical deposition systemNOVELLUS SYSTEMS INC·Filed 2006·Application pending·0 cites
- 1138US10186448B2Wafer support pedestal with wafer anti-slip and anti-rotation featuresLAM RES CORP·Filed 2016·Granted Jan 22, 2019·0 cites·19 claims
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