Inventor · disambiguated record
Hideharu Shido
Also filed as: SHIDO HIDEHARU
2 granted patents·0 citations·filing 2007–2007
22Inventor score
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2 records- 0143US7968466B2Fabrication process of a semiconductor device to form ultrafine patterns smaller than resolution limit of exposure apparatusFUJITSU SEMICONDUCTOR LTD·Filed 2007·Granted Jun 28, 2011·0 cites·10 claims
- 0241US7612400B2MIM device and electronic apparatusFUJITSU LTD·Filed 2007·Granted Nov 3, 2009·0 cites·20 claims
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