Inventor · name-matched record

PIKE L S ROSEMARY

1 granted patent·52 citations·filing 2000–2000

49Inventor score

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This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.

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1 record

0187US6355581B1Gas-phase additives for an enhancement of lateral etch component during high density plasma film deposition to improve film gap-fill capabilityCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Mar 12, 2002·52 cites·17 claims

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