Inventor · disambiguated record
Hariharakeshava Sarpangala Hegde
Also filed as: HEGDE HARIHARAKESHAVA · HEGDE HARIHARAKESHAVA S · HEGDE HARIHARAKESHAVA SARPANGALA
3 granted patents·6 pending applications·220 citations·filing 2006–2016
78Inventor score
Top patents by PatentIndex Score
9 records- 0194US8308921B1Mask for increased uniformity in ion beam depositionHINER HUGH C·Filed 2006·Granted Nov 13, 2012·149 cites·9 claims
- 0293US8087973B1Slider with leading edge blend and conformal step featuresSLADEK ERIC T·Filed 2008·Granted Jan 3, 2012·36 cites·10 claims
- 0392US8339742B1Slider with leading edge blend and conformal step featuresSLADEK ERIC T·Filed 2011·Granted Dec 25, 2012·35 cites·6 claims
- 0447US2016260585A1Multi-grid assembly in plasma source system and methods for improving sameHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2016·Application pending·0 cites
- 0546US2013015757A1Multi-grid assembly in plasma source system and methods for improving sameHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
- 0644US2013014898A1Plasma breakers and methods thereforHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
- 0744US2013014700A1Target shield designs in multi-target deposition system.HEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
- 0838US2014227460A1Methods for addressing inboard-outboard asymmetry in substrate processingHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2013·Application pending·0 cites
- 0936US2013015055A1Dual plasma source systems and methods for reactive plasma depositionHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
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