Inventor · disambiguated record
Dennis Klesel
Also filed as: KLESEL DENNIS · KLESEL DENNIS M
2 granted patents·16 citations·filing 2001–2013
56Inventor score
Top patents by PatentIndex Score
2 records- 0169US9275820B2Gas coupled arc chamber coolingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Mar 1, 2016·2 cites·18 claims
- 0269US6552892B2Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clampAXCELIS TECH INC·Filed 2001·Granted Apr 22, 2003·14 cites·22 claims
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