Inventor · disambiguated record

Kay Song

Also filed as: SONG KAY

1 granted patent·1 pending application·1 citations·filing 2011–2014

16Inventor score

Technology areasH10P

Files withAIXTRON INC1 WU HUI-JUNG1

Top patents by PatentIndex Score

2 records

0158US9564329B2Method and apparatus for fabricating dielectric structuresAIXTRON INC·Filed 2014·Granted Feb 7, 2017·1 cites·18 claims
0232US2012083134A1Method of mitigating substrate damage during deposition processesWU HUI-JUNG·Filed 2011·Application pending·0 cites

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →