Inventor · disambiguated record

Nobuaki Ohgushi

Also filed as: OHGUSHI NOBUAKI

1 granted patent·13 citations·filing 2003–2003

35Inventor score

Technology areasG03F

Files withCANON KK1

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1 record

0171US6891172B2Differential pumping system and exposure apparatusCANON KK·Filed 2003·Granted May 10, 2005·13 cites·22 claims

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