Inventor · disambiguated record
Tuby Tu
Also filed as: TU TUBY
11 granted patents·217 citations·filing 1996–1998
91Inventor score
Top patents by PatentIndex Score
11 records- 0184US6008106AMicro-trench oxidation by using rough oxide mask for field isolationMOSEL VITELIC INC·Filed 1997·Granted Dec 28, 1999·88 cites·18 claims
- 0273US5811344AMethod of forming a capacitor of a dram cellMOSEL VITELIC INC·Filed 1997·Granted Sep 22, 1998·37 cites·3 claims
- 0358US5869394ATeos-ozone planarization processMOSEL VITELIC INC·Filed 1996·Granted Feb 9, 1999·22 cites·9 claims
- 0450US6001745AMethod for forming a VIA in an inter metal dielectric (IMD) containing spin on glass (SOG)Filed 1998·Granted Dec 14, 1999·21 cites·6 claims
- 0540US6037251AProcess for intermetal SOG/SOP dielectric planarizationMOSEL VITELIC INC·Filed 1998·Granted Mar 14, 2000·11 cites·20 claims
- 0640US5989971AMethod for forming trenched polysilicon structureMOSEL VITELIC INC·Filed 1997·Granted Nov 23, 1999·6 cites·18 claims
- 0739US5879988ACapacitor of a DRAM cell and method of making sameMOSEL VITELIC INC·Filed 1996·Granted Mar 9, 1999·11 cites·10 claims
- 0839US5851867ARugged stacked oxide layer structure and method of fabricating sameMOSEL VITELLIC INC·Filed 1996·Granted Dec 22, 1998·8 cites·10 claims
- 0937US5960279AMethod of fabricating a capacitor on a rugged stacked oxide layerMOSEL VITELLIC INC·Filed 1996·Granted Sep 28, 1999·6 cites·7 claims
- 1036US5869399AMethod for increasing utilizable surface of rugged polysilicon layer in semiconductor deviceMOSEL VITELIC INC·Filed 1997·Granted Feb 9, 1999·4 cites·10 claims
- 1129US5883015AMethod for using oxygen plasma treatment on a dielectric layerMOSEL VITELIC INC·Filed 1997·Granted Mar 16, 1999·3 cites·10 claims
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