Inventor · disambiguated record
Frank Bernhard Sperling
Also filed as: SPERLING FRANK B · SPERLING FRANK BERNHARD
8 granted patents·2 pending applications·324 citations·filing 1993–2020
88Inventor score
Files withPHILIPS CORP4ASM LITHOGRAPHY BV1ASML NETHERLANDS BV1AUER-JONGEPIER SUZAN LEONIE1ENVENTURE GLOBAL TECHNOLOGY1
Top patents by PatentIndex Score
10 records- 0192US5815246ATwo-dimensionally balanced positioning device, and lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1997·Granted Sep 29, 1998·170 cites·13 claims
- 0278US5953105APositioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Sep 14, 1999·48 cites·11 claims
- 0376US9507276B2Positioning device, control device and control methodKONINKLIJKE PHILIPS NV·Filed 2013·Granted Nov 29, 2016·4 cites·13 claims
- 0476US6054784APositioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning deviceASM LITHOGRAPHY BV·Filed 1998·Granted Apr 25, 2000·43 cites·12 claims
- 0575US5767948ALithographic device with a three-dimensionally positionable mask holderPHILIPS CORP·Filed 1996·Granted Jun 16, 1998·37 cites·18 claims
- 0664US5456134AMagnetic transmission mechanism and applications thereofPHILIPS CORP·Filed 1993·Granted Oct 10, 1995·19 cites·15 claims
- 0763US8634052B2Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate tableAUER-JONGEPIER SUZAN LEONIE·Filed 2007·Granted Jan 21, 2014·3 cites·34 claims
- 0841US2007070837A1Disc drive apparatusKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 0937US2007246934A1Protective compression and tension sleeves for threaded connections for radially expandable tubular membersENVENTURE GLOBAL TECHNOLOGY·Filed 2005·Application pending·0 cites
- 1036US12007693B2Laser focussing moduleASML NETHERLANDS BV·Filed 2020·Granted Jun 11, 2024·0 cites·18 claims
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