Inventor · disambiguated record

Ryuichi Fukunishi

Also filed as: FUKUNISHI RYUICHI

1 granted patent·611 citations·filing 1996–1996

60Inventor score

Technology areasH10P

Files withFUJITSU LTD1

Top patents by PatentIndex Score

1 record

0196US5777838AElectrostatic chuck and method of attracting waferFUJITSU LTD·Filed 1996·Granted Jul 7, 1998·611 cites·15 claims

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