Inventor · disambiguated record

Nikolay N. Efremow

Also filed as: EFREMOW NIKOLAY N

1 granted patent·48 citations·filing 1987–1987

48Inventor score

Technology areasH10P

Files withMASSACHUSETTS INST TECHNOLOGY1

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1 record

0174US4734152ADry etching patterning of electrical and optical materialsMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Mar 29, 1988·48 cites·24 claims

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