Inventor · disambiguated record

Deakyun Jeong

Also filed as: JEONG DEAKYUN

1 granted patent·572 citations·filing 2010–2010

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Technology areasH10P

Files withLEE WOO JIN1

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1 record

0196US8173554B2Method of depositing dielectric film having Si-N bonds by modified peald methodLEE WOO JIN·Filed 2010·Granted May 8, 2012·572 cites·20 claims

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