Inventor · disambiguated record
Simon Gijsbert Josephus Mathijssen
Also filed as: MATHIJSSEN SIMON GIJSBERT · MATHIJSSEN SIMON GIJSBERT JOSEPHUS
60 granted patents·7 pending applications·169 citations·filing 2012–2023
98Inventor score
Files withASML NETHERLANDS BV64ASML HOLDING NV1MATHIJSSEN SIMON GIJSBERT JOSEPHUS1VRIJE UNIV AMSTERDAM1
Top patents by PatentIndex Score
67 records- 0197US9778025B2Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Oct 3, 2017·21 cites·25 claims
- 0296US9606442B2Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·16 cites·17 claims
- 0395US9958791B2Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 1, 2018·8 cites·16 claims
- 0494US9970747B2Position measurement with illumination profile having two diametrically opposed off-axis radiationASML NETHERLANDS BV·Filed 2017·Granted May 15, 2018·5 cites·20 claims
- 0593US11391677B2Methods and apparatus for predicting performance of a measurement method, measurement method and apparatusASML NETHERLANDS BV·Filed 2020·Granted Jul 19, 2022·5 cites·20 claims
- 0693US11360399B2Metrology sensor for position metrologyASML NETHERLANDS BV·Filed 2019·Granted Jun 14, 2022·10 cites·37 claims
- 0793US9632039B2Inspection apparatus, inspection method and manufacturing methodVRIJE UNIV AMSTERDAM·Filed 2015·Granted Apr 25, 2017·14 cites·19 claims
- 0892US10761432B2Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Sep 1, 2020·3 cites·13 claims
- 0992US10648919B2Methods and apparatus for predicting performance of a measurement method, measurement method and apparatusASML NETHERLANDS BV·Filed 2018·Granted May 12, 2020·7 cites·17 claims
- 1091US12032299B2Metrology method and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2020·Granted Jul 9, 2024·2 cites·25 claims
- 1191US10067068B2Lithographic apparatus and method for performing a measurementASML NETHERLANDS BV·Filed 2016·Granted Sep 4, 2018·5 cites·18 claims
- 1290US10133192B2Method and apparatus for determining the property of a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 20, 2018·6 cites·19 claims
- 1390US9939742B2Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Apr 10, 2018·6 cites·27 claims
- 1489US10788766B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·4 cites·19 claims
- 1589US10451559B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2018·Granted Oct 22, 2019·3 cites·13 claims
- 1688US10330606B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2017·Granted Jun 25, 2019·3 cites·12 claims
- 1788US9547241B2Alignment sensor, lithographic apparatus and alignment methodASML NETHERLANDS BV·Filed 2014·Granted Jan 17, 2017·5 cites·20 claims
- 1887US10585363B2Alignment systemASML NETHERLANDS BV·Filed 2016·Granted Mar 10, 2020·4 cites·15 claims
- 1987US10379448B2Methods and apparatus for predicting performance of a measurement method, measurement method and apparatusASML NETHERLANDS BV·Filed 2018·Granted Aug 13, 2019·3 cites·20 claims
- 2086US9733572B2Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Aug 15, 2017·4 cites·16 claims
- 2184US10599047B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2018·Granted Mar 24, 2020·2 cites·15 claims
- 2284US10466601B2Alignment sensor for lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·5 cites·20 claims
- 2383US10908513B2Metrology method and apparatus and computer programASML NETHERLANDS BV·Filed 2018·Granted Feb 2, 2021·3 cites·19 claims
- 2483US10416577B2Position measuring method of an alignment targetASML NETHERLANDS BV·Filed 2016·Granted Sep 17, 2019·3 cites·20 claims
- 2582US9551939B2Mark position measuring apparatus and method, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jan 24, 2017·6 cites·20 claims
- 2681US10474039B2Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 12, 2019·2 cites·17 claims
- 2780US10530111B2Apparatus for delivering gas and illumination source for generating high harmonic radiationASML NETHERLANDS BV·Filed 2018·Granted Jan 7, 2020·1 cites·17 claims
- 2880US2024168388A1Method for inferring a local uniformity metricASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2979US10267744B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·1 cites·19 claims
- 3078US10234771B2HHG source, inspection apparatus and method for performing a measurementASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·2 cites·19 claims
- 3175US10816906B2HHG source, inspection apparatus and method for performing a measurementASML NETHERLANDS BV·Filed 2019·Granted Oct 27, 2020·1 cites·20 claims
- 3274US10656533B2Metrology in lithographic processesASML NETHERLANDS BV·Filed 2018·Granted May 19, 2020·1 cites·19 claims
- 3374US10607873B2Substrate edge detectionASML NETHERLANDS BV·Filed 2017·Granted Mar 31, 2020·2 cites·21 claims
- 3474US10101675B2Metrology apparatus, method of measuring a structure and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Oct 16, 2018·1 cites·20 claims
- 3574US9927726B2Polarization independent interferometerASML NETHERLANDS BV·Filed 2014·Granted Mar 27, 2018·3 cites·17 claims
- 3672US12130246B2Method for overlay metrology and apparatus thereofASML NETHERLANDS BV·Filed 2019·Granted Oct 29, 2024·1 cites·18 claims
- 3772US11886125B2Method for inferring a local uniformity metricASML NETHERLANDS BV·Filed 2021·Granted Jan 30, 2024·0 cites·20 claims
- 3872US11022900B2Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Jun 1, 2021·0 cites·20 claims
- 3970US9835954B2Inspection method and apparatus, substrates for use therein and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 5, 2017·1 cites·17 claims
- 4065US12013647B2Metrology methodASML NETHERLANDS BV·Filed 2019·Granted Jun 18, 2024·0 cites·12 claims
- 4163US12189305B2Metrology method and apparatus and computer programASML NETHERLANDS BV·Filed 2021·Granted Jan 7, 2025·0 cites·14 claims
- 4263US10630037B2Apparatus for delivering gas and illumination source for generating high harmonic radiationASML NETHERLANDS BV·Filed 2019·Granted Apr 21, 2020·0 cites·20 claims
- 4362US12158435B2Illumination and detection apparatus for a metrology apparatusASML NETHERLANDS BV·Filed 2020·Granted Dec 3, 2024·0 cites·20 claims
- 4461US12474647B2Generating an alignment signal based on local alignment mark distortionsASML HOLDING NV·Filed 2021·Granted Nov 18, 2025·0 cites·20 claims
- 4560US12436470B2Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology methodASML NETHERLANDS BV·Filed 2021·Granted Oct 7, 2025·0 cites·15 claims
- 4660US12189314B2Metrology method and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2021·Granted Jan 7, 2025·0 cites·20 claims
- 4760US2025147429A1Determining a measurement recipe in a metrology methodASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 4860US2025348009A1Metrology method and associated metrology deviceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 4960US2025258442A1Metrology target and associated metrology methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 5058US12474642B2Metrology method for measuring an etched trench and associated metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 18, 2025·0 cites·15 claims
Showing the top 50 of 67 patent records by PatentIndex Score.
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