Inventor · disambiguated record

Hella Logtenberg

Also filed as: LOGTENBERG HELLA

1 granted patent·5 citations·filing 2017–2017

26Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0185US10073361B2EUV lithography system and operating methodZEISS CARL SMT GMBH·Filed 2017·Granted Sep 11, 2018·5 cites·15 claims

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