Inventor · disambiguated record
Mark Zellenrath
Also filed as: ZELLENRATH MARK
3 granted patents·10 citations·filing 2008–2017
63Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0185US10073361B2EUV lithography system and operating methodZEISS CARL SMT GMBH·Filed 2017·Granted Sep 11, 2018·5 cites·15 claims
- 0277US8436998B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2012·Granted May 7, 2013·3 cites·9 claims
- 0364US8289516B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2008·Granted Oct 16, 2012·2 cites·12 claims
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