Inventor · disambiguated record
Katsushi Kishimoto
Also filed as: KISHIMOTO KATSUSHI
31 granted patents·23 pending applications·356 citations·filing 1999–2022
96Inventor score
Top patents by PatentIndex Score
54 records- 0194US9543444B2Oxide sputtering target, and thin film transistor using the sameSAMSUNG DISPLAY CO LTD·Filed 2014·Granted Jan 10, 2017·7 cites·4 claims
- 0294US9246377B2Apparatus for transferring substrateSAMSUNG DISPLAY CO LTD·Filed 2014·Granted Jan 26, 2016·17 cites·15 claims
- 0392US6242686B1Photovoltaic device and process for producing the sameSHARP KK·Filed 1999·Granted Jun 5, 2001·118 cites·14 claims
- 0489US7540257B2Plasma processing apparatus and semiconductor device manufactured by the same apparatusSHARP KK·Filed 2006·Granted Jun 2, 2009·12 cites·19 claims
- 0589US6525264B2Thin-film solar cell moduleSHARP KK·Filed 2001·Granted Feb 25, 2003·59 cites·38 claims
- 0688US6383898B1Method for manufacturing photoelectric conversion deviceSHARP KK·Filed 2000·Granted May 7, 2002·48 cites·22 claims
- 0786US8137046B2Substrate transfer apparatus and substrate transfer methodKISHIMOTO KATSUSHI·Filed 2009·Granted Mar 20, 2012·14 cites·9 claims
- 0881US8092640B2Plasma processing apparatus and semiconductor device manufactured by the same apparatusKISHIMOTO KATSUSHI·Filed 2006·Granted Jan 10, 2012·7 cites·20 claims
- 0981US7565880B2Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the sameSHARP KK·Filed 2007·Granted Jul 28, 2009·4 cites·6 claims
- 1080US9799712B2Method of manufacturing light-emitting display device with reduced pressure dryingSAMSUNG DISPLAY CO LTD·Filed 2016·Granted Oct 24, 2017·4 cites·18 claims
- 1179US7927455B2Plasma processing apparatusSHARP KK·Filed 2005·Granted Apr 19, 2011·9 cites·13 claims
- 1276US7195673B2Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the sameSHARP KK·Filed 2003·Granted Mar 27, 2007·11 cites·13 claims
- 1376US7032536B2Thin film formation apparatus including engagement members for support during thermal expansionSHARP KK·Filed 2003·Granted Apr 25, 2006·12 cites·12 claims
- 1475US7979166B2Generation facility management systemSHARP KK·Filed 2005·Granted Jul 12, 2011·14 cites·10 claims
- 1574US7918939B2Semiconductor manufacturing apparatus and semiconductor manufacturing method using the sameSHARP KK·Filed 2005·Granted Apr 5, 2011·5 cites·15 claims
- 1670US6979589B2Silicon-based thin-film photoelectric conversion device and method of manufacturing thereofSHARP KK·Filed 2004·Granted Dec 27, 2005·11 cites·12 claims
- 1766US9530622B2Sputtering device and gas supply pipe for sputtering deviceSAMSUNG DISPLAY CO LTD·Filed 2014·Granted Dec 27, 2016·1 cites·20 claims
- 1863US11211576B2Organic light emitting device and method of manufacturing the sameSAMSUNG DISPLAY CO LTD·Filed 2020·Granted Dec 28, 2021·0 cites·9 claims
- 1960US8395250B2Plasma processing apparatus with an exhaust port above the substrateKISHIMOTO KATSUSHI·Filed 2008·Granted Mar 12, 2013·1 cites·7 claims
- 2059US10032927B2Oxide sputtering target, and thin film transistor using the sameSAMSUNG DISPLAY CO LTD·Filed 2016·Granted Jul 24, 2018·0 cites·6 claims
- 2159US8093142B2Plasma processing apparatus and plasma processing methodFUKUOKA YUSUKE·Filed 2006·Granted Jan 10, 2012·1 cites·7 claims
- 2257US2014245949A1Film forming device for solar cellSAMSUNG SDI CO LTD·Filed 2013·Application pending·0 cites
- 2355US11264571B2Bake system and method of fabricating display device using the sameSAMSUNG DISPLAY CO LTD·Filed 2019·Granted Mar 1, 2022·0 cites·13 claims
- 2454US12185559B2Organic light-emitting display apparatus having pixel electrodes with varying flatnessSAMSUNG DISPLAY CO LTD·Filed 2021·Granted Dec 31, 2024·0 cites·14 claims
- 2554US2010034622A1Substrate transfer apparatusKISHIMOTO KATSUSHI·Filed 2009·Application pending·0 cites
- 2653US2011088849A1Plasma processing apparatusSHARP KK·Filed 2009·Application pending·0 cites
- 2752US2013069193A1Intermediate layer for stacked type photoelectric conversion device, stacked type photoelectric conversion device and method for manufacturing stacked type photoelectric conversion deviceKISHIMOTO KATSUSHI·Filed 2011·Application pending·0 cites
- 2852US2009166622A1Plasma processing apparatus and semiconductor element manufactured by such apparatusKISHIMOTO KATSUSHI·Filed 2006·Application pending·0 cites
- 2951US10573841B2Organic light emitting device and method of manufacturing the sameSAMSUNG DISPLAY CO LTD·Filed 2017·Granted Feb 25, 2020·0 cites·10 claims
- 3050US2009113912A1Cooling System, Method for Operating the Same, and Plasma Processing System Using Cooling SystemKISHIMOTO KATSUSHI·Filed 2006·Application pending·0 cites
- 3149US9722089B2Thin film transistor array panel and manufacturing method thereofSAMSUNG DISPLAY CO LTD·Filed 2014·Granted Aug 1, 2017·0 cites·10 claims
- 3249US9484200B2Oxide sputtering target, thin film transistor using the same, and method for manufacturing thin film transistorSAMSUNG DISPLAY CO LTD·Filed 2013·Granted Nov 1, 2016·0 cites·13 claims
- 3348US9644270B2Oxide semiconductor depositing apparatus and method of manufacturing oxide semiconductor using the sameSAMSUNG DISPLAY CO LTD·Filed 2014·Granted May 9, 2017·0 cites·8 claims
- 3448US2011108128A1Vacuum treatment apparatus and gas supply methodKISHIMOTO KATSUSHI·Filed 2009·Application pending·0 cites
- 3548US2012219390A1Substrate transfer apparatusKISHIMOTO KATSUSHI·Filed 2012·Application pending·0 cites
- 3647US2011312167A1Plasma processing apparatus, and deposition method an etching method using the plasma processing apparatusKISHIMOTO KATSUSHI·Filed 2009·Application pending·0 cites
- 3747US2015184285A1Sputtering apparatus and method thereofSAMSUNG DISPLAY CO LTD·Filed 2014·Application pending·0 cites
- 3846US10052657B2Vacuum drying apparatus and method of manufacturing film using the sameSAMSUNG DISPLAY CO LTD·Filed 2016·Granted Aug 21, 2018·0 cites·16 claims
- 3946US7722738B2Semiconductor device manufacturing unit and semiconductor device manufacturing methodSHARP KK·Filed 2003·Granted May 25, 2010·1 cites·3 claims
- 4046US2010282168A1Plasma processing apparatus, heating device for plasma processing apparatus, and plasma processing methodKISHIMOTO KATSUSHI·Filed 2008·Application pending·0 cites
- 4146US2010012037A1Substrate transfer apparatusKISHIMOTO KATSUSHI·Filed 2009·Application pending·0 cites
- 4246US2010277050A1Plasma processing apparatusKISHIMOTO KATSUSHI·Filed 2008·Application pending·0 cites
- 4345US2023403919A1Organic light-emitting display apparatus and method of manufacturing the sameSAMSUNG DISPLAY CO LTD·Filed 2022·Application pending·0 cites
- 4444US8389389B2Semiconductor layer manufacturing method, semiconductor layer manufacturing apparatus, and semiconductor device manufactured using such method and apparatusKISHIMOTO KATSUSHI·Filed 2007·Granted Mar 5, 2013·0 cites·13 claims
- 4544US2004187785A1Deposition apparatus and deposition methodSHARP KK·Filed 2004·Application pending·0 cites
- 4643US10032922B2Thin-film transistor with crystallized active layer, method of manufacturing the same, and organic light-emitting display device including the sameSAMSUNG DISPLAY CO LTD·Filed 2015·Granted Jul 24, 2018·0 cites·20 claims
- 4743US2010147379A1Silicon-based thin-film photoelectric conversion device, and method and apparatus for manufacturing the sameKISHIMOTO KATSUSHI·Filed 2006·Application pending·0 cites
- 4843US2009166328A1Plasma etching methodKISHIMOTO KATSUSHI·Filed 2006·Application pending·0 cites
- 4941US2008164144A1Plasma Processing Apparatus And Method Of Producing Semiconductor Thin Film Using The SameKISHIMOTO KATSUSHI·Filed 2006·Application pending·0 cites
- 5040US2011283623A1Vacuum deviceOZAKI YUSUKE·Filed 2010·Application pending·0 cites
Showing the top 50 of 54 patent records by PatentIndex Score.
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