Inventor · disambiguated record

Aleksander Sergeevich Kovalev

Also filed as: KOVALEV ALEKSANDER SERGEEVICH

1 granted patent·1 citations·filing 2006–2006

16Inventor score

Technology areasG03F

Files withRAKHIMOVA TATYANA VICTOROVNA1

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1 record

0149US8317929B2Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatusRAKHIMOVA TATYANA VICTOROVNA·Filed 2006·Granted Nov 27, 2012·1 cites·18 claims

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