Inventor · disambiguated record
Hirofumi Minami
Also filed as: MINAMI HIROFUMI
19 granted patents·9 pending applications·73 citations·filing 1990–2020
92Inventor score
Top patents by PatentIndex Score
28 records- 0186US7645112B2Transport apparatus, control method for the same, and vacuum processing systemULVAC INC·Filed 2005·Granted Jan 12, 2010·12 cites·14 claims
- 0283US8366375B2Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatusULVAC INC·Filed 2007·Granted Feb 5, 2013·10 cites·13 claims
- 0381US7572093B2Transport apparatus, control method for the same, and vacuum processing systemULVAC INC·Filed 2005·Granted Aug 11, 2009·8 cites·13 claims
- 0478US6840732B2Transport apparatus and vacuum processing system using the sameULVAC INC·Filed 2001·Granted Jan 11, 2005·20 cites·6 claims
- 0576US8100524B2Stage apparatusTANAKA YASUZO·Filed 2010·Granted Jan 24, 2012·4 cites·2 claims
- 0669US8382421B2Transport apparatusULVAC INC·Filed 2009·Granted Feb 26, 2013·4 cites·10 claims
- 0769US7591625B2Carrying mechanism, a carrying device and a vacuum processing apparatusULVAC INC·Filed 2008·Granted Sep 22, 2009·3 cites·10 claims
- 0862US11559889B2Substrate transport device and substrate transporting methodULVAC INC·Filed 2020·Granted Jan 24, 2023·0 cites·7 claims
- 0960US9193067B2Rotation-transmitting mechanism, conveying apparatus, and driving apparatusFUJIMURA KAZUHIRO·Filed 2010·Granted Nov 24, 2015·2 cites·9 claims
- 1057US8505991B2Conveying device and vacuum apparatusMINAMI HIROFUMI·Filed 2011·Granted Aug 13, 2013·1 cites·8 claims
- 1155US8286318B2Stage apparatus assembling methodTANAKA YASUZO·Filed 2010·Granted Oct 16, 2012·1 cites·3 claims
- 1253US11628565B2Substrate transport device and substrate transporting methodULVAC INC·Filed 2020·Granted Apr 18, 2023·0 cites·6 claims
- 1348US2010111649A1Transfer device and vacuum processing apparatus using the sameULVAC INC·Filed 2009·Application pending·0 cites
- 1446US8840116B2Seal mechanism and treatment apparatusMUSHA KAZUHIRO·Filed 2009·Granted Sep 23, 2014·0 cites·10 claims
- 1546US2011062641A1Stage equipped with alignment function, processing apparatus having the stage equipped with alignment function, and method of aligning substrateSATO SEIICHI·Filed 2009·Application pending·0 cites
- 1645US2010109220A1Substrate Holding Mechanism and Substrate Assembly Apparatus Including the SameULVAC INC·Filed 2008·Application pending·0 cites
- 1743US10612130B2Vacuum processing apparatusULVAC INC·Filed 2019·Granted Apr 7, 2020·0 cites·7 claims
- 1843US2005095112A1Transport apparatus and vacuum processing system using the sameULVAC INC·Filed 2004·Application pending·0 cites
- 1940US8717737B2Substrate conveyance method and substrate conveyance systemMINAMI HIROFUMI·Filed 2011·Granted May 6, 2014·0 cites·11 claims
- 2038US2009173278A1Stage apparatusTANAKA YASUZOU·Filed 2007·Application pending·0 cites
- 2138US2009092467A1Stage apparatusTANAKA YASUZOU·Filed 2007·Application pending·0 cites
- 2236US8408503B2Stage apparatusTANAKA YASUZO·Filed 2010·Granted Apr 2, 2013·0 cites·4 claims
- 2336US5184072AApparatus for measuring weak static magnetic field using superconduction strips and a SQUID magnetometerRESEARCH DEV CORP·Filed 1991·Granted Feb 2, 1993·6 cites·6 claims
- 2435US2012288347A1Conveying device and vacuum apparatusMINAMI HIROFUMI·Filed 2012·Application pending·0 cites
- 2533US8167417B2Discharge unit and discharge apparatusMIYATA TAKAHIRO·Filed 2011·Granted May 1, 2012·0 cites·8 claims
- 2630US5053707AApparatus for positioning a pick-up coil for detecting magnetic flux quantum trapped in a superconductorJAPAN RES DEV CORP·Filed 1990·Granted Oct 1, 1991·2 cites·4 claims
- 2722US2012025054A1Holding apparatus, conveying apparatus, and rotation-transmitting apparatusMUSHA KAZUHIRO·Filed 2010·Application pending·0 cites
- 2822US2012114456A1Holding apparatus, conveying apparatus, and rotation-transmitting apparatusMUSHA KAZUHIRO·Filed 2010·Application pending·0 cites
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