Inventor · disambiguated record
Kazuhiro Musha
Also filed as: MUSHA KAZUHIRO
8 granted patents·4 pending applications·14 citations·filing 2007–2020
76Inventor score
Top patents by PatentIndex Score
12 records- 0183US8366375B2Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatusULVAC INC·Filed 2007·Granted Feb 5, 2013·10 cites·13 claims
- 0269US8382421B2Transport apparatusULVAC INC·Filed 2009·Granted Feb 26, 2013·4 cites·10 claims
- 0362US11559889B2Substrate transport device and substrate transporting methodULVAC INC·Filed 2020·Granted Jan 24, 2023·0 cites·7 claims
- 0453US11628565B2Substrate transport device and substrate transporting methodULVAC INC·Filed 2020·Granted Apr 18, 2023·0 cites·6 claims
- 0546US8840116B2Seal mechanism and treatment apparatusMUSHA KAZUHIRO·Filed 2009·Granted Sep 23, 2014·0 cites·10 claims
- 0646US2011062641A1Stage equipped with alignment function, processing apparatus having the stage equipped with alignment function, and method of aligning substrateSATO SEIICHI·Filed 2009·Application pending·0 cites
- 0745US2010109220A1Substrate Holding Mechanism and Substrate Assembly Apparatus Including the SameULVAC INC·Filed 2008·Application pending·0 cites
- 0843US10612130B2Vacuum processing apparatusULVAC INC·Filed 2019·Granted Apr 7, 2020·0 cites·7 claims
- 0940US8717737B2Substrate conveyance method and substrate conveyance systemMINAMI HIROFUMI·Filed 2011·Granted May 6, 2014·0 cites·11 claims
- 1033US8167417B2Discharge unit and discharge apparatusMIYATA TAKAHIRO·Filed 2011·Granted May 1, 2012·0 cites·8 claims
- 1122US2012025054A1Holding apparatus, conveying apparatus, and rotation-transmitting apparatusMUSHA KAZUHIRO·Filed 2010·Application pending·0 cites
- 1222US2012114456A1Holding apparatus, conveying apparatus, and rotation-transmitting apparatusMUSHA KAZUHIRO·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →