Inventor · disambiguated record
Palanikumaran Sakthivel
Also filed as: SAKTHIVEL PALANIKUMARAN
4 granted patents·3 pending applications·67 citations·filing 1997–2021
78Inventor score
Files withAXCELIS TECH INC2AMBAY IMMUNE SENSORS AND CONTROLS LLC/AMBAY1BECKNELL ALAN FREDERICK1SRIVASTAVA ASEEM KUMAR1UNIV HOUSTON1
Top patents by PatentIndex Score
7 records- 0186US8268181B2Plasma ashing apparatus and endpoint detection processSRIVASTAVA ASEEM KUMAR·Filed 2009·Granted Sep 18, 2012·16 cites·17 claims
- 0283US7381651B2Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing processAXCELIS TECH INC·Filed 2006·Granted Jun 3, 2008·10 cites·19 claims
- 0374US8580076B2Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewithBECKNELL ALAN FREDERICK·Filed 2003·Granted Nov 12, 2013·15 cites·37 claims
- 0454US6082374AFluorine assisted stripping and residue removal in sapphire downstream plasma asherFiled 1997·Granted Jul 4, 2000·26 cites·13 claims
- 0542US2023416837A1Compositions and methods for identification, assessment and treatment of cancer patientAMBAY IMMUNE SENSORS AND CONTROLS LLC/AMBAY·Filed 2021·Application pending·0 cites
- 0641US2007228008A1Medium pressure plasma system for removal of surface layers without substrate lossUNIV HOUSTON·Filed 2005·Application pending·0 cites
- 0740US2004235299A1Plasma ashing apparatus and endpoint detection processAXCELIS TECH INC·Filed 2003·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →