Inventor · disambiguated record
Max Christian Schuermann
Also filed as: SCHUERMANN MAX C · SCHUERMANN MAX CHRISTIAN
6 granted patents·2 pending applications·23 citations·filing 2003–2013
76Inventor score
Files withXTREME TECH GMBH3BOLSHUKHIN DENIS1JENOPTIK MIKROTECHNIK GMBH1MISSALLA THOMAS1SCHUERMANN MAX CHRISTIAN1
Top patents by PatentIndex Score
8 records- 0178US7329876B2Narrow-band transmission filter for EUV radiationXTREME TECH GMBH·Filed 2007·Granted Feb 12, 2008·6 cites·15 claims
- 0267US7328885B2Plasma radiation source and device for creating a gas curtain for plasma radiation sourcesXTREME TECH GMBH·Filed 2004·Granted Feb 12, 2008·14 cites·17 claims
- 0355US8410422B2Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasmaBOLSHUKHIN DENIS·Filed 2012·Granted Apr 2, 2013·1 cites·17 claims
- 0452US8686372B2Method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensityMISSALLA THOMAS·Filed 2011·Granted Apr 1, 2014·2 cites·17 claims
- 0550US9421647B2Method of manufacturing mirror shells of a nested shells grazing incidence mirrorUSHIO ELECTRIC INC·Filed 2013·Granted Aug 23, 2016·0 cites·9 claims
- 0643US2010078578A1Method and arrangement for the operation of plasma-based short-wavelength radiation sourcesXTREME TECH GMBH·Filed 2009·Application pending·0 cites
- 0732US2004062350A1Arrangement for determining the spectral reflectivity of a measurement objectJENOPTIK MIKROTECHNIK GMBH·Filed 2003·Application pending·0 cites
- 0831US8610354B2Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current dischargeSCHUERMANN MAX CHRISTIAN·Filed 2011·Granted Dec 17, 2013·0 cites·14 claims
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