Inventor · disambiguated record
Erwin Theodorus Jacoba Verhagen
Also filed as: VERHAGEN ERWIN THEODORUS JACOB · VERHAGEN ERWIN THEODORUS JACOBA
1 granted patent·1 pending application·2 citations·filing 2005–2008
20Inventor score
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0165US7283225B2Particle detection device, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 16, 2007·2 cites·35 claims
- 0242US2009148604A1Substrate Processing Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
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