Inventor · disambiguated record
Orlando Serapio Cicilia
Also filed as: CICILIA ORLANDO SERAPIO
2 granted patents·1 pending application·14 citations·filing 2004–2008
58Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0176US7843552B2Lithographic apparatus, device manufacturing method, and mask having a pellicle attached heretoASML NETHERLANDS BV·Filed 2005·Granted Nov 30, 2010·5 cites·16 claims
- 0269US7379154B2Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicleASML NETHERLANDS BV·Filed 2004·Granted May 27, 2008·9 cites·18 claims
- 0350US2008137049A1Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicleASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
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