Inventor · disambiguated record
Won-Yong Koh
Also filed as: KOH WON YONG
10 granted patents·2 pending applications·514 citations·filing 1996–2015
90Inventor score
Files withKOREA RES INST CHEM TECH3ASM GENITECH KOREA LTD2GENITECH CO LTD1GENITECH INC1KOREA INST SCI & TECH1
Top patents by PatentIndex Score
12 records- 0197US6720262B2Method of forming copper interconnections and thin films using chemical vapor deposition with catalystGENITECH INC·Filed 2000·Granted Apr 13, 2004·335 cites·12 claims
- 0295US7141278B2Thin film forming methodASM GENITECH KOREA LTD·Filed 2001·Granted Nov 28, 2006·122 cites·10 claims
- 0391US7485349B2Thin film forming methodASM GENITECH KOREA LTD·Filed 2006·Granted Feb 3, 2009·17 cites·39 claims
- 0456US5998644AVolatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using sameKOREA RES INST CHEM TECH·Filed 1998·Granted Dec 7, 1999·6 cites·4 claims
- 0555US6409830B1Process for preparing a limo2 type heterometallic oxide filmKOREA RES INST CHEM TECH·Filed 2000·Granted Jun 25, 2002·2 cites·4 claims
- 0649US5922405AProcess for the preparation of aluminum oxide film using dialkylaluminum alkoxideKOREA RES INST CHEM TECH·Filed 1996·Granted Jul 13, 1999·14 cites·6 claims
- 0747US6426117B1Method for forming a three-component nitride film containing metal and siliconGENITECH CO LTD·Filed 1999·Granted Jul 30, 2002·14 cites·20 claims
- 0839US10290493B2Method for manufacturing silicon-containing thin filmUP CHEMICAL CO LTD·Filed 2015·Granted May 14, 2019·0 cites·14 claims
- 0939US2005037154A1Method for forming thin filmFiled 2002·Application pending·0 cites
- 1035US2005034664A1Apparatus for depositingFiled 2002·Application pending·0 cites
- 1132US6063951AVolatile magnesium alkylaluminum alkoxide and deposition of magnesium aluminate film using sameKOREA RESEARCH INST OF TECHNOL·Filed 1997·Granted May 16, 2000·4 cites·8 claims
- 1231US6156916AVolatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using sameKOREA INST SCI & TECH·Filed 1999·Granted Dec 5, 2000·0 cites·11 claims
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