Inventor · disambiguated record
Michael Kovalerchik
Also filed as: KOVALERCHIK MICHAEL
5 granted patents·4 pending applications·58 citations·filing 2000–2006
80Inventor score
Top patents by PatentIndex Score
9 records- 0182US6781138B2Positioning stage with stationary actuatorsNIKON CORP·Filed 2001·Granted Aug 24, 2004·20 cites·36 claims
- 0274US6753534B2Positioning stage with stationary and movable magnet tracksNIKON CORP·Filed 2001·Granted Jun 22, 2004·19 cites·37 claims
- 0361US6903346B2Stage assembly having a follower assemblyNIKON CORP·Filed 2001·Granted Jun 7, 2005·6 cites·75 claims
- 0461US6515381B1Cantilever stageNIKON CORP·Filed 2000·Granted Feb 4, 2003·7 cites·22 claims
- 0560US6570644B2Connection assembly of wafer stage chamberNIKON CORP·Filed 2001·Granted May 27, 2003·6 cites·11 claims
- 0640US2002021427A1Cantilever reticle stage for electron beam projection lithography systemFiled 2001·Application pending·0 cites
- 0735US2008079220A1Rotary seal for diffusion furnance incorporating nonmetallic sealsAVIZA TECH INC·Filed 2006·Application pending·0 cites
- 0834US2002159046A1Base assembly for a stage chamber of a wafer manufacturing systemNIKON CORP·Filed 2001·Application pending·0 cites
- 0933US2003230729A1Positioning stage with stationary and movable magnet tracksFiled 2000·Application pending·0 cites
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