Inventor · disambiguated record
Nobukazu Ishizaka
Also filed as: ISHIZAKA NOBUKAZU
16 granted patents·1 pending application·472 citations·filing 1995–2005
95Inventor score
Files withTOKYO ELECTRON LTD17
Top patents by PatentIndex Score
17 records- 0193US6676757B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2000·Granted Jan 13, 2004·60 cites·12 claims
- 0290US6383948B1Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2000·Granted May 7, 2002·57 cites·19 claims
- 0387US6193783B1Apparatus and method for supplying a process solutionTOKYO ELECTRON LTD·Filed 1999·Granted Feb 27, 2001·70 cites·14 claims
- 0485US6616760B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Sep 9, 2003·28 cites·14 claims
- 0583US6872256B2Film forming unitTOKYO ELECTRON LTD·Filed 2003·Granted Mar 29, 2005·25 cites·10 claims
- 0683US6514344B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Feb 4, 2003·28 cites·39 claims
- 0782US7087118B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2005·Granted Aug 8, 2006·6 cites·9 claims
- 0881US6605153B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 12, 2003·26 cites·8 claims
- 0978US6824616B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Nov 30, 2004·20 cites·12 claims
- 1077US6391111B1Coating apparatusTOKYO ELECTRON LTD·Filed 1999·Granted May 21, 2002·50 cites·5 claims
- 1177US5636401ACleaning apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 1995·Granted Jun 10, 1997·47 cites·28 claims
- 1275US6716478B2Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Apr 6, 2004·17 cites·7 claims
- 1373US6773510B2Substrate processing unitTOKYO ELECTRON LTD·Filed 2002·Granted Aug 10, 2004·17 cites·17 claims
- 1471US6936107B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2003·Granted Aug 30, 2005·11 cites·21 claims
- 1556US7179504B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 20, 2007·4 cites·8 claims
- 1638US5882426AMethod of cleaning a substrate by scrubbingTOKYO ELECTRON LTD·Filed 1997·Granted Mar 16, 1999·6 cites·5 claims
- 1736US2001003966A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →