Inventor · disambiguated record
Marinus Aart Van Den Brink
Also filed as: BRINK MARINUS AART VAN DEN · VAN DEN BRINK MARINUS A · VAN DEN BRINK MARINUS AART
26 granted patents·2 pending applications·1,153 citations·filing 1986–2024
97Inventor score
Files withASML NETHERLANDS BV15ASM LITHOGRAPHY BV5ASM LITHOGRAPHY3VAN DEN BRINK MARINUS AART3DE JONG FREDERIK EDUARD1
Top patents by PatentIndex Score
28 records- 0199US7161659B2Dual stage lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jan 9, 2007·271 cites·14 claims
- 0297US12093632B2Machine learning based inverse optical proximity correction and process model calibrationASML NETHERLANDS BV·Filed 2022·Granted Sep 17, 2024·2 cites·20 claims
- 0396US5801832AMethod of and device for repetitively imaging a mask pattern on a substrate using five measuring axesASM LITHOGRAPHY·Filed 1995·Granted Sep 1, 1998·181 cites·17 claims
- 0496US5191200AImaging apparatus having a focus-error and/or tilt detection devicePHILIPS CORP·Filed 1991·Granted Mar 2, 1993·200 cites·52 claims
- 0595US7589818B2Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatusASML NETHERLANDS BV·Filed 2003·Granted Sep 15, 2009·66 cites·84 claims
- 0693US5100237AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1990·Granted Mar 31, 1992·110 cites·34 claims
- 0792US11544440B2Machine learning based inverse optical proximity correction and process model calibrationASML NETHERLANDS BV·Filed 2019·Granted Jan 3, 2023·6 cites·20 claims
- 0892USRE44446EDual stage lithographic apparatus and device manufacturing methodVAN DEN BRINK MARINUS AART·Filed 2012·Granted Aug 20, 2013·6 cites·34 claims
- 0992US5144363AApparatus for and method of projecting a mask pattern on a substrateASM LITHOGRAPHY BV·Filed 1991·Granted Sep 1, 1992·112 cites·71 claims
- 1091USRE43576EDual stage lithographic apparatus and device manufacturing methodVAN DEN BRINK MARINUS AART·Filed 2009·Granted Aug 14, 2012·10 cites·33 claims
- 1190US5481362AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1993·Granted Jan 2, 1996·84 cites·28 claims
- 1285US12500063B2Method and apparatus for inspectionASML NETHERLANDS BV·Filed 2024·Granted Dec 16, 2025·0 cites·20 claims
- 1382US6084673ALithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holdersASM LITHOGRAPHY BV·Filed 1997·Granted Jul 4, 2000·49 cites·15 claims
- 1479US2024403536A1Machine learning based inverse optical proximity correction and process model calibrationASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1576USRE45576EDual stage lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jun 23, 2015·1 cites·34 claims
- 1674US11875966B2Method and apparatus for inspectionASML NETHERLANDS BV·Filed 2021·Granted Jan 16, 2024·0 cites·22 claims
- 1774US7046331B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted May 16, 2006·15 cites·25 claims
- 1873US8514365B2Lithographic apparatus and device manufacturing methodDE JONG FREDERIK EDUARD·Filed 2007·Granted Aug 20, 2013·5 cites·20 claims
- 1966USRE47943EDual stage lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Apr 14, 2020·0 cites·35 claims
- 2060US8248583B2Lithographic apparatus and calibration methodVAN DEN BRINK MARINUS AART·Filed 2009·Granted Aug 21, 2012·1 cites·18 claims
- 2159USRE46933EDual stage lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jul 3, 2018·0 cites·34 claims
- 2259US4746800APositioning device comprising a z-manipulator and a θ-manipulatorASM LITHOGRAPHY BV·Filed 1986·Granted May 24, 1988·16 cites·11 claims
- 2358US11094502B2Method and apparatus for inspectionASML NETHERLANDS BV·Filed 2016·Granted Aug 17, 2021·0 cites·20 claims
- 2457US6239862B1Photolithographic apparatusASM LITHOGRAPHY BV·Filed 2000·Granted May 29, 2001·4 cites·7 claims
- 2557US2009296061A1Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatusASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2656US12099306B2Method for controlling a lithographic systemASML NETHERLANDS BV·Filed 2020·Granted Sep 24, 2024·0 cites·12 claims
- 2756US6067146APhotolithographic apparatusASM LITHOGRAPHY BV·Filed 1997·Granted May 23, 2000·14 cites·20 claims
- 2837US10268128B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Apr 23, 2019·0 cites·20 claims
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