Inventor · disambiguated record
Kazuhisa Nakashita
Also filed as: NAKASHITA KAZUHISA
9 granted patents·528 citations·filing 1989–1999
92Inventor score
Files withSEMICONDUCTOR ENERGY LAB9
Top patents by PatentIndex Score
9 records- 0196US5643801ALaser processing method and alignmentSEMICONDUCTOR ENERGY LAB·Filed 1995·Granted Jul 1, 1997·160 cites·4 claims
- 0295US5891764ALaser processing apparatus and laser processing processSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted Apr 6, 1999·147 cites·39 claims
- 0392US4971667APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Nov 20, 1990·52 cites·15 claims
- 0486US6638800B1Laser processing apparatus and laser processing processSEMICONDUCTOR ENERGY LAB·Filed 1999·Granted Oct 28, 2003·55 cites·19 claims
- 0584US5079031AApparatus and method for forming thin filmsSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Jan 7, 1992·29 cites·8 claims
- 0674US5283087APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1992·Granted Feb 1, 1994·25 cites·24 claims
- 0763US4987004APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1990·Granted Jan 22, 1991·22 cites·16 claims
- 0862US5256483APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1990·Granted Oct 26, 1993·15 cites·28 claims
- 0959US5013688AMethod of manufacturing a semiconductor using plasma processingSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted May 7, 1991·23 cites·9 claims
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