Inventor · disambiguated record
Tzu-Chin Chuang
Also filed as: CHUANG TZU CHIN
9 granted patents·1 pending application·261 citations·filing 1994–2014
90Inventor score
Top patents by PatentIndex Score
10 records- 0195US7304302B1Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysisKLA TENCOR TECH CORP·Filed 2005·Granted Dec 4, 2007·55 cites·46 claims
- 0289US5491347AThin-film structure with dense array of binary control units for presenting imagesXEROX CORP·Filed 1994·Granted Feb 13, 1996·101 cites·19 claims
- 0383US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0480US7709792B2Three-dimensional imaging using electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted May 4, 2010·7 cites·21 claims
- 0576US8765496B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisNASSER-GHODSI MEHRAN·Filed 2008·Granted Jul 1, 2014·4 cites·21 claims
- 0670US5518805AHillock-free multilayer metal lines for high performance thin film structuresXEROX CORP·Filed 1994·Granted May 21, 1996·41 cites·6 claims
- 0763US5528082AThin-film structure with tapered featureXEROX CORP·Filed 1994·Granted Jun 18, 1996·34 cites·15 claims
- 0861US8890066B1Sharp scattering angle trap for electron beam apparatusGOTKIS YEHIEL·Filed 2005·Granted Nov 18, 2014·1 cites·17 claims
- 0960US2014291516A1Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for AnalysisKLA TENCOR TECH CORP·Filed 2014·Application pending·0 cites
- 1036US5693983AThin-film structure with conductive molybdenum-chromium lineXEROX CORP·Filed 1994·Granted Dec 2, 1997·7 cites·13 claims
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