Inventor · disambiguated record
Ralf Schönberger
Also filed as: SCHÖNBERGER RALF
2 granted patents·0 citations·filing 2014–2019
23Inventor score
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0152US11150552B2Method and apparatus for analyzing a defective location of a photolithographic maskZEISS CARL SMT GMBH·Filed 2019·Granted Oct 19, 2021·0 cites·24 claims
- 0244US9863760B2Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated mannerZEISS CARL SMT GMBH·Filed 2014·Granted Jan 9, 2018·0 cites·25 claims
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