Inventor · disambiguated record
Hanzhong Xiao
Also filed as: XIAO HANZHONG
2 granted patents·1 pending application·7 citations·filing 2003–2006
51Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0157US7049052B2Method providing an improved bi-layer photoresist patternLAM RES CORP·Filed 2003·Granted May 23, 2006·6 cites·15 claims
- 0243US2006166145A1Method providing an improved bi-layer photoresist patternXIAO HANZHONG·Filed 2006·Application pending·0 cites
- 0341US6949469B1Methods and apparatus for the optimization of photo resist etching in a plasma processing systemLAM RES CORP·Filed 2003·Granted Sep 27, 2005·1 cites·24 claims
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