Inventor · disambiguated record
Alexander Mattheus
Also filed as: MATTHEUS ALEXANDER
2 granted patents·2 citations·filing 2000–2006
35Inventor score
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2 records- 0141US7665416B2Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particlesR3T GMBH RAPID REACTIVE RADICA·Filed 2006·Granted Feb 23, 2010·0 cites·28 claims
- 0240US6566271B1Method of producing a semiconductor surface covered with fluorineINFINEON TECHNOLOGIES AG·Filed 2000·Granted May 20, 2003·2 cites·8 claims
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