Inventor · disambiguated record
Takahito Kasai
Also filed as: KASAI TAKAHITO
7 granted patents·3 pending applications·4 citations·filing 2008–2021
71Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0175US10607869B2Substrate processing system and control deviceTOKYO ELECTRON LTD·Filed 2018·Granted Mar 31, 2020·2 cites·5 claims
- 0268US9207665B2Heat treatment apparatus and method of controlling the sameTOKYO ELECTRON LTD·Filed 2013·Granted Dec 8, 2015·2 cites·4 claims
- 0347US12165892B2Control device, system and control methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 10, 2024·0 cites·14 claims
- 0446US11568027B2License authentication device and license authentication methodTOKYO ELECTRON LTD·Filed 2020·Granted Jan 31, 2023·0 cites·17 claims
- 0545US2009110824A1Substrate processing apparatus and method of controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0642US10504803B2Substrate processing system, control device, and film deposition method and programTOKYO ELECTRON LTD·Filed 2018·Granted Dec 10, 2019·0 cites·11 claims
- 0737US10692782B2Control device, substrate processing system, substrate processing method, and programTOKYO ELECTRON LTD·Filed 2017·Granted Jun 23, 2020·0 cites·9 claims
- 0836US10395934B2Control device, substrate processing system, substrate processing method, and programTOKYO ELECTRON LTD·Filed 2017·Granted Aug 27, 2019·0 cites·19 claims
- 0936US2017278699A1Control device, substrate processing system, substrate processing method, and programTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1035US2017271218A1Control device, substrate processing system, substrate processing method, and programTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →