Inventor · disambiguated record
Matthew J. Rodnick
Also filed as: RODNICK MATTHEW J · RODNICK MATTHEW JONATHON
8 granted patents·29 citations·filing 2010–2017
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0188US8731718B2Dual sensing end effector with single sensorRODNICK MATTHEW J·Filed 2010·Granted May 20, 2014·16 cites·18 claims
- 0286US9779977B2End effector assembly for clean/dirty substrate handlingLAM RES CORP·Filed 2015·Granted Oct 3, 2017·5 cites·16 claims
- 0374US9184084B2Wafer handling traction control systemLAM RES CORP·Filed 2014·Granted Nov 10, 2015·3 cites·25 claims
- 0473US9698035B2Microstructures for improved wafer handlingLAM RES CORP·Filed 2013·Granted Jul 4, 2017·3 cites·19 claims
- 0560US9673071B2Buffer station for thermal control of semiconductor substrates transferred therethrough and method of transferring semiconductor substratesLAM RES CORP·Filed 2014·Granted Jun 6, 2017·1 cites·25 claims
- 0659US9214375B2End effector having multiple-position contact pointsRODNICK MATTHEW J·Filed 2012·Granted Dec 15, 2015·1 cites·11 claims
- 0752US10707113B2End effector assembly for clean/dirty substrate handlingLAM RES CORP·Filed 2017·Granted Jul 7, 2020·0 cites·7 claims
- 0845US9434071B2Wafer handling traction control systemLAM RES CORP·Filed 2015·Granted Sep 6, 2016·0 cites·20 claims
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